| Related citation: | DUAN Zhong-xia,YUAN Jie,ZHAO Quan-liang,LU Ran,CAO Mao-sheng.Oriented Growth of PZT thick film embedded with PZT nanoparticles[J].Journal of Harbin Institute Of Technology(New Series),2009,16(2):232-236.DOI:10.11916/j.issn.1005-9113.2009.02.017. |
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| Author Name | Affiliation | | DUAN Zhong-xia | School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn | | YUAN Jie | School of Information Engineering, Centre University for Nationality, Beijing 100081, China | | ZHAO Quan-liang | School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn | | LU Ran | School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn | | CAO Mao-sheng | School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn |
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| Abstract: |
| This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb(Zr0.52Ti0.48)O3, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4 μm-thick PZT film which was annealed at 700 ℃ for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3 μm-thick PZT thick film which was annealed at 700 ℃ for 5 min has the strongest (100) orientation degree, which is 82.3％. |
| Key words: PZT sol-gel thick film oriented growth |
| DOI：10.11916/j.issn.1005-9113.2009.02.017 |
| Clc Number:TP273 |
| Fund: |
