| Related citation: | XIAO Qi-jun,CHEN Wen-yuan,CUI feng,LI Sheng-yong,LIU Chao-ying,ZHANG Wei-ping.Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope[J].Journal of Harbin Institute Of Technology(New Series),2010,17(5):672-678.DOI:10.11916/j.issn.1005-9113.2010.05.014. |
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| Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope |
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| Author Name | Affiliation | | XIAO Qi-jun | National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China
Faculty of Electronic Information & Mechanical Electrical Engineering,Zhaoqing University,Zhaoqing 526061,China | | CHEN Wen-yuan | National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China | | CUI feng | National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China | | LI Sheng-yong | National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China | | LIU Chao-ying | Faculty of Electronic Information & Mechanical Electrical Engineering,Zhaoqing University,Zhaoqing 526061,China | | ZHANG Wei-ping | National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China |
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| Abstract: |
| A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given. |
| Key words: electrostatically suspended micro-gyroscope rebalance loop complete decoupling |
| DOI：10.11916/j.issn.1005-9113.2010.05.014 |
| Clc Number:U666.15 |
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