| Author Name | Affiliation | | Yan-Bo Wei | School of Electronic Engineering, Heilongjiang University, Harbin 150080, China | | Li-Ping Shi | School of Electronic Engineering, Heilongjiang University, Harbin 150080, China | | Xi-Wen Wei | School of Electronic Engineering, Heilongjiang University, Harbin 150080, China | | Jie Huang | School of Electronic Engineering, Heilongjiang University, Harbin 150080, China |
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| Abstract: |
| The paper is concerned with the micro-flow self-sensing actuators, the work of which is based on the secondary piezoelectric effect. The piezoelectric ceramic stack can yield micro-displacement due to its first inverse piezoelectric effect. Therefore, we apply this micro-displacement to cell micro-flow injection. Moreover, due to the charge of the secondary direct piezoelectric effect, the piezoelectric ceramic stack is able to detect the force and displacement in the injection by itself. The experiments of first inverse piezoelectric effect and secondary direct piezoelectric effect are conducted. The experiment results show that, subjected to 0-60 V input, the piezoelectric ceramic stack can generate 13.45 μm displacement, and control accuracy can achieve 2 nm. It can completely meet the needs of cell micro-flow injection. Also, the experiments demonstrate that the micro-displacement due to the first inverse piezoelectric effect can be well self-sensed by the electric charge due to the secondary direct piezoelectric effect. |
| Key words: secondary piezoelectric effect micro-flow self-sensing actuator |
| DOI：10.11916/j.issn.1005-9113.2014.02.010 |
| Clc Number:TN384 |
| Fund: |
