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Supervised by Ministry of Industry and Information Technology of The People's Republic of China Sponsored by Harbin Institute of Technology Editor-in-chief Yu Zhou ISSNISSN 1005-9113 CNCN 23-1378/T

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Related citation:Na Li,Bo Wang,Hui-Liang Jin.Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica[J].Journal of Harbin Institute Of Technology(New Series),2014,21(5):124-128.DOI:10.11916/j.issn.1005-9113.2014.05.021.
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Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica
Author NameAffiliation
Na Li School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China 
Bo Wang School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China 
Hui-Liang Jin School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China 
Abstract:
In order to get ultra-smooth fused silica surface without subsurface damage efficiently, the atmospheric pressure plasma processing (APPP) method has been developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms, so the subsurface damage caused by contact stress can be avoided and atomic-level precision can be ensured. In this paper, based on the spectral quantitative analysis theory, the influence laws on material removal rate by the key factors of APPP including the flow rate of reaction gases, the input power, the processing distance and time are discussed. In addition, the results that APPP can remove the damaged surface layer and do not introduce secondary damage are proved via the nanoindentation technology.
Key words:  atmospheric pressure plasma processing  fused silica  material removal rate  surface quality
DOI：10.11916/j.issn.1005-9113.2014.05.021
Clc Number:TH16
Fund:

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