| 预沉积无序碳对CVD金刚石成膜的增强作用 |
| |
| 引用本文： | 唐壁玉,靳九成.预沉积无序碳对CVD金刚石成膜的增强作用[J].材料科学与工艺,1997,5(3):76-78. |
| |
| 作者姓名： | 唐壁玉 靳九成 |
| |
| 作者单位： | 湖南大学!湖南大学化工学院，410082，湖南大学，湖南大学，湖南大学 |
| |
| 摘 要： | 研究了热丝ＣＶＤ系统中预沉积无定形碳对金属石成核的促进作用，分析了金 不管不顾民核的特征和机理，探索了无定形碳上金刚石成核的条件，并由此实现了ＹＧ８硬质合金上金刚石的成核和生长。
|
| 关 键 词： | 化学气相沉积 金刚石薄膜 成核 无定形碳 |
Enhancement of CVD Diamond Fielm By Predeposition of Amorphous Carbon |
| |
| Tang Biyu,Jing Jiucheng, Xia Jingtong, Cheng Zhongzhang.Enhancement of CVD Diamond Fielm By Predeposition of Amorphous Carbon[J].Materials Science and Technology,1997,5(3):76-78. |
| |
| Authors: | Tang Biyu Jing Jiucheng Xia Jingtong Cheng Zhongzhang |
| |
| Affiliation: | Hunan University |
| |
| Abstract: | The promotion of diamond nucleation by predeposition of amorphous carbon in Hot-filament chemical vapor deposition system was studied. The feature and mechanism of diamond nucleation were analysed, and the condition for diamond nucleation on predeposited amorphous carbon was also investigatal.Through predeposition of amorphous carbon, the nucleation and growth of diamond on carbide substrate YG8 were realized. |
| |
| Keywords: | Chemical vapor deposition diamond films mucleation amorphous carbon |
| 本文献已被 CNKI 维普 等数据库收录！ |
