In order to improve the positioning precision,a system with precision design and kinematics calibration is established for the wafer handling robot with high speed and high precision.An error model of wafer handling robot is built in this article and the sensitivity of each error factor is analyzed.Combined the geometrical error iteration method with the parameter identification based on inverse kinematics equation,a multiplestep error calibration and identification method is proposed.The geometrical structure error can be identified and compensated through this method.Simulation and experimental results show that the positioning precision is largely improved after the calibration and compensation.