Abstract:To eliminate the common mode input in the the micromachined gyroscopes, a novel architecture of the micromachined gyroscope is proposed in this paper. The structure of the MEMS is designed to be symmetrical, and two-degree of freedom (DOF) oscillators are utilized in both drive-mode and sense-mode. Driving force actuates two driving masses to move with anti-phase in drive-mode. The novel architecture consists of identical left and right tines, which provides immunity to common mode input of environmental variations. To avoid the coupling between drive-mode and sense-mode, the drive-mode suspensions are introduced in sense-mode. The gyroscope is designed to be double-decoupled structure. Compared to the drive-mode of the proposed gyroscope, the gain of frequency response is increased by about 30 dB in the sense-mode. The bandwidth of drive-mode and sense-mode are 250 Hz and 310 Hz respectively. The gyroscope can provide stable gain and phase in the operational frequency region, and provide immunity to common mode input of environmental variations.