In order to improve the process of non-traditional micro machining,a composite technology with solid tool was proposed.Several non-traditional micro-machining processes were analyzed and their common features were found out.The micro electro-discharge machining(EDM),micro ultrasonic machining(USM) and micro electrochemical machining(ECM) were combined in the same system.The module design was used for this system.The basic module was developed,and a video microscopic subsystem was equipped in the system.Then,Ф5 μm micro rods,Ф6 μm micro holes,and microstructures with complicated profile were machined by micro EDM;the micro holes with aspect ratio larger than 25 were machined by EDM with USM in inversion installing;Ф13 μm micro holes were drilled by micro USM;and Ф100 μm micro holes were machined with micro ECM.This kind of combination expands the range of non-traditional micro machining and improves the processing efficiency.