In order to improve the performance of the closed-loop micro-accelerometer and control the feedback system better,a PID controller was used,a mathematical model of the system was established and the transfer function of the system was analyzed.The model was simulated in the software SIMULINK.Results show that the PID controller can optimize the damping of the system.In addition,both the response time and rise time of the system are decreased.Experimental results show that the performance of the closed-loop accelerometer is improved significantly for the use of PID.