To solve the coupling problem from driving electrode to sensing electrode of micro-mechanical angular rate sensor,a closed-loop driving approach of electrostatic force based on voltage frequency modulation is proposed,which separates the mechanical resonance frequency from voltage drive frequency without changing the phase and frequency of electrostatic force.Automatic gain control circuits are adopted to get 0.01% amplitude instability of closed-loop drive,and integrated transimpedance amplifier on chip has capacitive resolution of 1 aF/sqrt(Hz).The chip is fabricated in the 2 μm two-metal and two-poly n-well CMOS process with an area of 18.9 mm2.The complete module operates from ±9 V supply and has a measured sensitivity of 10 mV/(°)/s with bias instability is 190(°)/h.Test results show that the proposed approach can be applied to closed-loop drive of micro-mechanical angular rate sensor without adjusting circuits phase in atmospheric package(Q is 80).