Terminal optical module and reflector mount are the important components of laser-driven inertial confinement fusion (ICF) device, having the characteristic of owning much and scattered motion axes. The control system that can achieve the motion control of this device is built upon the thought of distributing control. The system contains Beckhoff embedded PC and bus terminals as underlying controller and EtherCAT as the communication network. Software of the control system is developed under the VC++ and TwinCAT environment. The special functions required by mechanical systems are all be programmed to the PLC function block and work in the clients, such as the function of motor lock when power up and down, the motor’s automatic power-up, certain moving axis’ manual follow, one-way positioning,and so on. Among these functions, one-way poisoning can make sure the repeat location accuracy within 3μrad. The control system has the characteristics of simple construction, low cost and fast communications speed. It can keep stable and reliable in the practical engineering applications.