| Author Name | Affiliation | | Yan Zhou | Department of Electrical Engineering, Southwest Jiaotong University, Chengdu 610031, China | | Jie Liu | Department of Electrical Engineering, Southwest Jiaotong University, Chengdu 610031, China | | Xin Lu | Department of Electrical Engineering, Southwest Jiaotong University, Chengdu 610031, China | | Quanfang Chen | Department of Electrical Engineering, Southwest Jiaotong University, Chengdu 610031, China |
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| Abstract: |
| Capacitive micromechanical ultrasonic transducers (CMUTs) have been widely studied because they can be used as substitutes for piezoelectric ultrasonic transducers in imaging applications. However, it is unclear whether and how CMUTs can be developed for sensors incorporating other functions. For instance, researchers have proposed the use of CMUTs for pressure sensing, but fundamental and practical application issues remain unsolved. This study explored ways in which a pressure sensor can be properly developed based on a CMUT prototype using a simulation approach. A three-dimensional finite element model of CMUTs was designed using the COMSOL Multiphysics software by combining the working principle of CMUTs with pressure sensing characteristics in which the resonance frequency of the CMUT cell shifts accordingly when it is subjected to an external pressure. Simultaneously, when subjected to pressure, the CMUT membrane deforms, thus the pressure can be reflected by the change in the capacitance. |
| Key words: capacitive micromechanical ultrasonic transducers (CMUTs) pressure sensor collapsing voltage resonance frequency capacitance finite element multi-physics simulation |
| DOI：10.11916/j.issn.1005-9113.2021154 |
| Clc Number:TP930 |
| Fund: |
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| Descriptions in Chinese: |
| 应用于压力传感的CMUT仿真分析 周燕，刘杰，鲁鑫，陈全芳 （西南交通大学 电气工程学院，成都 610031 ） 摘要：电容式微机械超声换能器(CMUTs)作为压电式超声换能器在成像领域的替代品，得到了广泛的研究，然而，目前尚不清楚CMUT是否以及如何开发用于包含其他功能的传感器。例如，研究人员已经提出使用CMUT进行压力传感，但一些基本问题和实际应用问题仍未解决。本研究探讨了如何利用仿真方法在CMUT原型的基础上正确开发压力传感器。本研究利用COMSOL Multiphysics软件，设计了CMUT的三维有限元模型。结合CMUT的工作原理和CMUT单元在外界压力作用下共振频率发生相应变化的压力传感特性，以及CMUT受到压力时薄膜产生变形，压力可以通过电容变化反映的传感特性进行研究。 关键词：电容式微机械超声换能器；压力传感器；共振频率；电容；有限元Multiphysics仿真 |
