| Related citation: | Hongfang Chen,Mengyang Sun,Yinglun Ma,Liang Tang,Yu Wang,Huixu Song.Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System[J].Journal of Harbin Institute Of Technology(New Series),2023,30(4):37-49.DOI:10.11916/j.issn.1005-9113.22014. |
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| Author Name | Affiliation | | Hongfang Chen | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China | | Mengyang Sun | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China | | Yinglun Ma | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China | | Liang Tang | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China | | Yu Wang | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China | | Huixu Song | Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124,China |
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| Abstract: |
| A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance. A comprehensive model of the interference fringe contrast based on the laser tracing system's measurement principle was established in this study. Simulation results based on ZEMAX verified the model. According to the simulation results, the placement angle of the analyzer had a direct influence on the interference fringe contrast. When the angle of the polarized light to the analyzer's transmission axis increased from 65° to 85°, each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528, the interference fringe contrast is decreased by 65%. Under the split ratio of beam splitters in the interference part (BS1) of 5∶5, when the splitting ratio of BS2 changed from 2∶8 to 8∶2, the fringe contrast of the interference signals received by the photodetectors increased, but the injection light intensity onto the PSD reflected by BS2 decreased. The significant influence of the tracing performance was verified by the experiments. When splitting ratio of BS2 increased, the contrast of the interference fringes increased. Due to the weakening of the incident light intensity of the PSD caused by the change of BS2 splitting ratio, the response time of the tracing system is increased by 23.7 ms. As a result, the tracing performance of the laser tracing measurement optical system was degraded. An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems. |
| Key words: interference fringe contrast laser tracing measurement high precision measurement ZEMAX. |
| DOI：10.11916/j.issn.1005-9113.22014 |
| Clc Number:TH741 |
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| Descriptions in Chinese: |
| 激光追踪测量光学系统条纹对比度模型的建立及误差分析 陈洪芳*，孙梦阳，马英伦，汤亮，王煜，宋辉旭 （北京工业大学，材料与制造学部，北京市精密测控技术与仪器工程技术研究中心，北京 100124） 摘要：本文提出一种激光追踪测量光学系统光学元件性能非理想及放置误差对条纹对比度影响的分析方法。基于激光追踪系统的测量原理，建立了激光追踪测量光学系统干涉条纹对比度的综合模型。基于ZEMAX的仿真结果验证了该模型的正确性。仿真结果表明，检偏器的放置角度对干涉条纹对比度有直接影响。当检偏器放置角度从65°增加到85°时，干涉条纹对比度从0.9996降低到0.3528，干涉条纹对比度降低了65%。当干涉光路中的分光镜BS1的分光比为5:5，分光镜BS2的分光比从2:8变化到8:2时，光电探测器接收到的干涉信号条纹对比度增大，但BS2反射到PSD上的入射光强减小。实验验证了该影响的显著性，当BS2分光比增大时，干涉条纹的对比度增大。同时由于BS2分光比的变化导致PSD的入射光强减弱，追踪系统的响应时间增加了23.7ms。这导致激光追踪测量光学系统的追踪性能下降。本研究为评价和提高激光追踪测量系统的精度和可靠性提供了重要的理论依据。 关键词：干涉条纹，对比度，激光追踪测量，高精度测量，ZEMAX |
