| 引用本文: | 李赞,吴晓宏,姜文锐,施云波.新型酞菁有机半导体材料的制备及气敏性研究[J].材料科学与工艺,2011,19(2):108-112.DOI:10.11951/j.issn.1005-0299.20110222. |
| LI Zan,WU Xiao-hong,JIANG Wen-rui,SHI Yun-bo.Preparation and gas sensitivity study of new phthalocyanine organic semiconductor materials[J].Materials Science and Technology,2011,19(2):108-112.DOI:10.11951/j.issn.1005-0299.20110222. |
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| 摘要: |
| 针对无机半导体气体传感器材料可修饰性差、工作温度高等缺点,开展了新型金属酞菁类有机半导体气敏材料的研究,并对敏感材料进行了表征,测试结果与化学结构和理论值一致.采用微电子工艺制备平面叉指电极,采用旋涂技术,在叉指电极上形成敏感膜,对制备的旋涂膜进行红外光谱(IR)和原子力扫描电镜(AFM)表征,AFM图像表明薄膜表面均匀、平滑和致密.按照静态法测试了薄膜对NO2气体的气敏特性,结果表明,在室温和50℃时质量浓度为6.5 mg/mL的PbPc(iso-PeO)8旋涂膜相较于CuPc(iso-PeO)8、NiPc(iso-PeO)8旋涂膜表现出对NO2气体更好的敏感性和响应恢复性. |
| 关键词: 有机半导体 气敏材料 NO2 |
| DOI：10.11951/j.issn.1005-0299.20110222 |
| 分类号:O649 |
| 基金项目:哈尔滨学院青年基金资助项目(HXKQ200723);国家自然科学基金资助项目(60772019);中国博士后科学基金面上资助项目(20080440839) |
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| Preparation and gas sensitivity study of new phthalocyanine organic semiconductor materials |
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LI Zan1,2, WU Xiao-hong1, JIANG Wen-rui3, SHI Yun-bo4
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1.College of Science,Harbin Institute of Technology,Harbin 150001,China;2.School of Life Science and Chemistry, Harbin University,Harbin 150086,China;3.College of Mechanical and Electrical Engineering,Harbin Institute of Technology,Harbin 150001,China;4.Mechanical Engineering Center for Post-doctoral Studies, Harbin of Science and Technology University,Harbin 150080,China
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| Abstract: |
| Aiming at the poor adjustment and high operating temperature of inorganic semiconductor sensor,a research of new matallophthalocyanine organic semiconductor gas-sensing materials was carried out.The senisng materials were characterized,and the result was consistent with chemistry configuration and calculational reslut.Plane fork electrode was prepared by using micro-electronic technology,and sensitive membranes were formed on fork electrode by means of spin-coating technology.The thin films were characterized by IR and AFM,and the AFM image showed that the surface of the thin film was uniform,smooth and compact.The gas sensing properties of spin-coated films are determined to NO2 by static state method,and the result showed that PbPc(iso-PeO)8 with 6.5 mg·mL-1 had better gas sensitivity and response-recovery characteristic than CuPc(iso-PeO)8 and NiPc(iso-PeO)8. |
| Key words: organic semiconductor gas-sensing material nitrogen dioxide |
