| 引用本文: | 刘旭东,毕孝国,唐坚,牛微,孙旭东.生长工艺对生长室内温度分布影响的数值模拟[J].材料科学与工艺,2015,23(6):57-64.DOI:10.11951/j.issn.1005-0299.20150611. |
| LIU Xudong,BI Xiaoguo,TANG Jian,NIU Wei,SUN Xudong.Numerical simulation of the influence of growth parameters on the temperature distribution in growth chamber[J].Materials Science and Technology,2015,23(6):57-64.DOI:10.11951/j.issn.1005-0299.20150611. |
|
| 摘要: |
| 为给实验研究晶体生长工艺提供必要的理论指导,以氢气和氧气的燃烧为基础,研究了焰熔法生长金红石单晶体过程中生长室内的温度分布特征,分析了H2和O2流量、喷嘴尺寸对温度分布的影响.研究表明:适合金红石单晶体生长的最佳燃烧器为内O2、中H2和外O2的三管结构；随着H2流量增加,生长室轴心线上和径向温度逐渐增大,H2流量增加2 L/min,中心最高温度平均升高160 ℃,位置向下移动约2.5 mm；随着内、外O2流量增加,生长室轴心线上和径向温度逐渐降低,与内O2的影响相比,外O2对中心温度影响较小,而对径向温度的影响较大；随着内O2喷嘴孔径的增加,生长室轴心线上最高温度逐渐增大,而位置逐渐向喷嘴方向移动,而外O2和H2喷嘴孔径对轴心线上最高温度的影响非常小. |
| 关键词: 金红石单晶体 焰熔法 生长室 温度分布 燃烧器 |
| DOI：10.11951/j.issn.1005-0299.20150611 |
| 分类号:O782 |
| 基金项目:国家自然科学基金资助项目(51472047). |
|
| Numerical simulation of the influence of growth parameters on the temperature distribution in growth chamber |
|
LIU Xudong1, BI Xiaoguo1, TANG Jian1, NIU Wei1, SUN Xudong2
|
|
(1.School of Energy and Power, Shenyang Institute of Engineering, Shenyang 110136,China; 2.School of Materials and Metallurgy, Northeastern University, Shenyang 110006,China)
|
| Abstract: |
| To provide necessary theoretical guidance for the experimental study on the growth process of rutile crystals, temperature distribution in growth chamber was investigated for preparation of rutile single crystal with hydro-oxygen flame fusion method. And effects of oxygen and hydrogen flow rate and nozzle size on temperature distribution were analyzed. Results showed that the optimal burner for growing of rutile single crystal was a three-tube structure containing inner, middle and outer tubers for oxygen, hydrogen and oxygen, respectively. With the increasing hydrogen flow rate, the center and radial temperature increased gradually in the chamber, and the position of the peak temperature gradually moved down, which downward moved 2.5 mm when the hydrogen flow rate increased for 2 L/min, while the peak temperature rose 160 ℃ in average. With the increasing inner and outer oxygen flow rate, the center and radial temperature decreased gradually in the chamber. Compared with the inner oxygen, the outer oxygen had little effect on the center temperature and much impact on the radial temperature. With the increasing diameter of nozzle for inner oxygen, the peak temperature increased gradually in the chamber and the position of the peak temperature gradually moved up, while the increasing diameter of nozzle for outer oxygen and middle hydrogen had little effect on the center temperature. |
| Key words: rutile single crystal flame fusion method growth chamber temperature distribution burner |
