| 引用本文: | 黄文波,李文芳,吴晶.微弧氧化生成钛酸盐系铁电薄膜研究[J].材料科学与工艺,2011,19(2):52-56.DOI:10.11951/j.issn.1005-0299.20110212. |
| HUANG Wen-bo,LI Wen-fang,WU Jing.Deposition of titanate ferroelectric thin films by microarc oxidation[J].Materials Science and Technology,2011,19(2):52-56.DOI:10.11951/j.issn.1005-0299.20110212. |
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| 摘要: |
| 为开发新的铁电薄膜制备工艺,需将Ti板微弧氧化.采用Ba(OH)2、Ba(CH3COO)2、BaCl2、Ba(OH)2+Ba(NO3)2及Pb(CH3COO)2对Ti板进行微弧氧化试验,并对生成的薄膜进行物相组成和显微形貌的分析.结果表明:Ti板在BaCl2、Pb(CH3COO)2及Ba(OH)2+Ba(NO3)2中不发生微弧氧化,在Ba(OH)2、Ba(CH3COO)2中发生微弧氧化.薄膜主要由BaTiO3相构成,表面散布着很多微孔,薄膜厚度均匀.根据实验结果,可以得出微弧氧化生成铁电薄膜对溶液成分的要求和发生反应的电流-浓度区间,以及工艺参数的选用原则.薄膜在1 kHz频率下的介电常数为112. |
| 关键词: 铁电薄膜 制备技术 钛酸盐 BaTiO3 微弧氧化 |
| DOI：10.11951/j.issn.1005-0299.20110212 |
| 分类号:TB43 |
| 基金项目:中国博士后科学基金特别资助项目(200902317) |
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| Deposition of titanate ferroelectric thin films by microarc oxidation |
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HUANG Wen-bo1, LI Wen-fang1, WU Jing2
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1.College of Material Science and Engineering,South China University of Technology,Guangzhou 510640,China;2.Dept.of Mechanical and Electrical Engineering,Guangdong Communication Polytechnic,Guangzhou 510800,China
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| Abstract: |
| To develop a new technology for deposition of ferroelectric thin film,Ti plates must be microarc oxidated.In this paper,Ti plates were processed by microarc oxidation(MAO) in a series of electrolytes,which were composed of Ba(OH)2,Ba(CH3COO)2,BaCl2,Ba(OH)2+Ba(NO3)2,Pb(CH3COO)2respectively,and the phase composition and morphologies of films were investigated.Results revealed that microarc occurred successfully in Ba(OH)2 and Ba(CH3COO)2 solutions but failed in BaCl2、Pb(CH3COO)2 and Ba(OH)2+Ba(NO3)2 solutions.The film was mainly composed of BaTiO3 phase and scattered with small holes.By comparing the results with different electrolytic,concentrations and currents,a general law for selection of electrolytic compositions and optimal technique was put forward.Dielectric constant of 112 was measured at frequency of 1 kHz. |
| Key words: ferroelectric thin film deposition titanate BaTiO3 microarc oxidation |
