| 引用本文: | 乐其河,黄晓狄,宋轩,颜丙功,江开勇.基于EDTA-Cu的柔性阴极制备试验与机理研究[J].材料科学与工艺,2021,29(4):39-44.DOI:10.11951/j.issn.1005-0299.20200173. |
| LE Qihe,HUANG Xiaodi,SONG Xuan,YAN Binggong,JIANG Kaiyong.Study on fabrication and mechanism of flexible cathode based on EDTA-Cu[J].Materials Science and Technology,2021,29(4):39-44.DOI:10.11951/j.issn.1005-0299.20200173. |
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| 基于EDTA-Cu的柔性阴极制备试验与机理研究 |
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乐其河1,2,黄晓狄1,2,宋轩1,2,颜丙功1,2,江开勇1,2
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(1.华侨大学 机电及自动化学院,福建 厦门 361021;2.福建省特种能场制造重点试验室(华侨大学),福建 厦门 361021)
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| 摘要: |
| 为制备低成本和环保的柔性阴极,研究柔性电极的制备机理,本文以EDTA-Cu为活性材料,利用激光诱导化学镀铜工艺,制备了电解加工柔性阴极并进行了系统表征,对相关机理进行了探讨。试验结果表明,基于EDTA-Cu和改性聚氨酯的柔性阴极具有较好的激光诱导化学镀铜选择性,活性材料的成分和颗粒形貌、激光功率、扫描速度、激光波长、激光光斑尺寸和脉冲频率等是影响镀铜精度的主要因素,通过调整相关因素可以有效控制镀铜精度。此外,X射线能谱和俄歇电子能谱的测试结果表明,基于 EDTA-Cu的柔性阴极经激光扫描后,扫描区域出现Cu0和Cu+1,从而揭示出以EDTA-Cu为活性成分的柔性阴极的化学镀铜机理。经过验证,EDTA-Cu制备的柔性电极可以满足电解加工的要求,能够加工出边缘齐整的线条。 |
| 关键词: 改性聚氨酯 EDTA-Cu 激光活化 化学镀铜 电解加工 喷雾干燥 |
| DOI：10.11951/j.issn.1005-0299.20200173 |
| 分类号:TB34 |
| 文献标识码:A |
| 基金项目:国家自然科学基金资助项目(51475174)；福建省自然科学基金资助项目(2017J01089)；厦门市科技计划项目(3502Z20163010)；华侨大学科研基金资助项目(Z16Y0020)；华侨大学2019年实验教学与管理改革课题(SY2019Z012). |
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| Study on fabrication and mechanism of flexible cathode based on EDTA-Cu |
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LE Qihe1,2, HUANG Xiaodi1,2, SONG Xuan1,2, YAN Binggong1,2, JIANG Kaiyong1,2
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(1.College of Meachanical Engineering and Automation, Huaqiao University, Xiamen 361021,China; 2.Fujian Key Laboratory of Special Energy Manufacturing(Huaqiao University), Xiamen 361021, China)
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| Abstract: |
| To fabricate the environmentally friendly flexible cathode with low cost and study the fabrication mechanism of flexible cathode, EDTA-Cu was used as the active material and the flexible cathode was fabricated by laser-induced electroless copper plating in this paper. The flexible cathode was systematically characterized and the related mechanism was discussed. Tests showed that flexible cathodes based on EDTA-Cu and modified polyurethane had better laser-induced electroless copper selectivity. Composition and particle morphology of active materials, laser power, scanning speed, laser wavelength, laser spot size and pulse frequency were the main factors affecting the precision of electroless copper plating. The accuracy of copper plating can be effectively controlled by adjusting relevant factors. In addition, X-ray energy spectrum and Auger electron spectroscopy test results showed that after the flexible cathode based on EDTA-Cu was scanned by laser, Cu0 and Cu+1 appeared in the scanning area, thus revealing the mechanism of electroless copper plating. With experimental verification, the fabricated flexible cathode using EDTA-Cu can meet the requirements of electrochemical machining, and the machined groove presents the uniform edge. |
| Key words: modified polyurethane EDTA-Cu laser activation electroless plating electrochemical machining spray drying |
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