| 引用本文: | 刘延杰,郑小飞,吴明月.晶圆传输机器人标定技术研究[J].哈尔滨工业大学学报,2010,42(1):74.DOI:10.11918/j.issn.0367-6234.2010.01.018 |
| LIU Yan-jie,ZHENG Xiao-fei,WU Ming-yue.Calibration technique of wafer handling robot[J].Journal of Harbin Institute of Technology,2010,42(1):74.DOI:10.11918/j.issn.0367-6234.2010.01.018 |
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| 摘要: |
| 为了提高高速高精度晶圆传输机器人的定位精度,建立了精度分析和运动学标定为一体的精度保障体系.针对机器人的特点,建立了误差模型,分析了各结构几何参数误差源的灵敏度,提出了结合几何误差迭代法和基于运动学逆解的非线性参数辨识的分步标定方法,对其进行了标定,并对几何结构参数进行了误差补偿.仿真分析以及实验证明:机器人定位误差达到0.07mm,有效地提高了机器人末端的定位精度. |
| 关键词: 晶圆传输机器人 运动学标定 参数辨识 误差补偿 |
| DOI：10.11918/j.issn.0367-6234.2010.01.018 |
| 分类号:TP242 |
| 基金项目:国家重点基础研究发展规划资助项目(2009CB724206);国家科技重大专项资助项目(2009ZX02012-02) |
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| Calibration technique of wafer handling robot |
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LIU Yan-jie, ZHENG Xiao-fei, WU Ming-yue
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State Key Laboratory of Robotics and System,Harbin Institute of Technology,Harbin 150080,China
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| Abstract: |
| In order to improve the positioning precision,a system with precision design and kinematics calibration is established for the wafer handling robot with high speed and high precision.An error model of wafer handling robot is built in this article and the sensitivity of each error factor is analyzed.Combined the geometrical error iteration method with the parameter identification based on inverse kinematics equation,a multiplestep error calibration and identification method is proposed.The geometrical structure error can be identified and compensated through this method.Simulation and experimental results show that the positioning precision is largely improved after the calibration and compensation. |
| Key words: wafer handling robot kinematic calibration parameter identification error compensation |
