| 引用本文: | 陈伟平,王天阳,尹亮,陈晓亮,郭玉刚,刘晓为.一种电容式闭环微加速度计系统[J].哈尔滨工业大学学报,2010,42(11):1720.DOI:10.11918/j.issn.0367-6234.2010.11.009 |
| CHEN Wei-ping,WANG Tian-yang,YIN Liang,CHEN Xiao-liang,GUO Yu-gang,LIU Xiao-wei.Closed-loop system of a capacitive micro-accelerometer[J].Journal of Harbin Institute of Technology,2010,42(11):1720.DOI:10.11918/j.issn.0367-6234.2010.11.009 |
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| 摘要: |
| 为了提高闭环微加速度传感器的性能,对反馈系统实现更好的控制作用,引入了PID控制器,并建立了闭环系统数学模型,分析了系统的传输函数.利用SIMLINK对该模型进行了仿真分析,结果表明PID控制器很好的改善了系统的阻尼,减小了系统的响应时间和调节时间.通过实验得到阶跃响应波形,证明PID控制的引入可以大大提高系统性能。 |
| 关键词: MEMS 加速度计 闭环系统 PID控制器 |
| DOI：10.11918/j.issn.0367-6234.2010.11.009 |
| 分类号:TH824.4 |
| 基金项目: |
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| Closed-loop system of a capacitive micro-accelerometer |
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CHEN Wei-ping, WANG Tian-yang, YIN Liang, CHEN Xiao-liang, GUO Yu-gang, LIU Xiao-wei
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MEMS Center,Harbin Institute of Technology,150001,China
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| Abstract: |
| In order to improve the performance of the closed-loop micro-accelerometer and control the feedback system better,a PID controller was used,a mathematical model of the system was established and the transfer function of the system was analyzed.The model was simulated in the software SIMULINK.Results show that the PID controller can optimize the damping of the system.In addition,both the response time and rise time of the system are decreased.Experimental results show that the performance of the closed-loop accelerometer is improved significantly for the use of PID. |
| Key words: MEMS accelerometer closed-loop system PID controller |
