| 引用本文: | 林谢昭,应济,陈子辰.静电无阀微泵两种仿真模型的比较研究[J].哈尔滨工业大学学报,2010,42(12):1943.DOI:10.11918/j.issn.0367-6234.2010.12.020 |
| LIN Xie-zhao,YING Ji,CHEN Zi-chen.Comparing research on two different numerical models of electrostatically actuated valveless micropump[J].Journal of Harbin Institute of Technology,2010,42(12):1943.DOI:10.11918/j.issn.0367-6234.2010.12.020 |
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| 摘要: |
| 为提高无阀微泵性能,分别采用全耦合模型(FCM)和预先定义泵膜位移的模型(PDM)对基于扩散/收缩单元的静电无阀微泵的动态特性进行计算仿真.对泵膜变形形状、泵膜中点位移、泵腔内压力以及进出口处流量等的变化历程进行比较.结果表明:PDM模型计算费用较低,但无法以较高精度近似泵膜变形的动态特性,进而导致错误的瞬态流场结果.要准确仿真微泵的动态特性,必须考虑电-结构-流场之间的相互作用. |
| 关键词: 静电无阀微泵 静电-结构-流体耦合 MEMSCAD |
| DOI：10.11918/j.issn.0367-6234.2010.12.020 |
| 分类号:TH38 |
| 基金项目:国家自然科学基金资助项目(50475104);浙江省自然科学基金资助项目(Z106519);福建省教育厅资助项目(JB07007) |
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| Comparing research on two different numerical models of electrostatically actuated valveless micropump |
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LIN Xie-zhao1,2, YING Ji2, CHEN Zi-chen2
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1.The College of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350002,China;2.The College of Mechanical and Energy Engineering,Zhejiang University,Hangzhou 310027,China
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| Abstract: |
| To improve the performance of electrostatically actuated valveless micropump,simulation of its dynimic characteristics have been conducted by full electrostatic-mechanic-fluidic coupled model(CFM) and prescribed deformations model(PDM)respectively.By comparing the calculated results of diaphragm deflections,transient variations of central displacements,chamber pressures and flow rate of inlet/outlet,it can be concluded that the PDM has lower cost and inadequate precision,but some distorting dynamic characteristics may be resulted from;The FCM can predict the transient behaviors of the micropump quite well since the effects of electro-mechanical coupling and fluid-structural interaction have been considered,but the computation cost is much more expensive. |
| Key words: Electrostatically actuated valveless micropump electrostatic-mechanic-fluidic coupled MEMSCAD |
