| 引用本文: | 孙明,谭晓昀,李子芃,刘晓为.新型低噪声微机械陀螺闭环驱动电路[J].哈尔滨工业大学学报,2011,43(9):38.DOI:10.11918/j.issn.0367-6234.2011.09.008 |
| SUN Ming,TAN Xiao-yun,LI Zi-peng,LIU Xiao-wei.New low noise closed-loop driving circuit for the micro-gyroscope[J].Journal of Harbin Institute of Technology,2011,43(9):38.DOI:10.11918/j.issn.0367-6234.2011.09.008 |
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| 摘要: |
| 为将陀螺结构引入到闭环驱动电路的仿真系统中,建立了与微机械陀螺结构等价的电学模型.微机械陀螺闭环驱动电路基于电荷泵锁相环技术,用低噪声跨阻放大器代替传统的电荷放大器实现I-V转换,有效避免了电荷放大器在实现I-V转换时所产生的随陀螺固有频率变化而变化的相位误差.用基于CCCII+技术的有源电阻代替无源电阻,大大降低了电路的噪声,并且提高了电路的集成度.仿真结果表明,微机械陀螺结构的固有频率为2.7 kHz,陀螺结构在驱动方向位移的相位滞后于驱动方向驱动力相位90°;在50μA的偏置电流下,有源电阻阻值为250 kΩ,在工作频率下的噪声为0.037 fV2/Hz,大大低于无源电阻的噪声.闭环接口电路实现了在陀螺固有频率下的自激振荡. |
| 关键词: 闭环驱动电路 微机械陀螺 CCCII+ |
| DOI：10.11918/j.issn.0367-6234.2011.09.008 |
| 分类号:V241.5 |
| 基金项目:国家高技术研究发展计划资助项目(2008AA042201) |
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| New low noise closed-loop driving circuit for the micro-gyroscope |
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SUN Ming1, TAN Xiao-yun1, LI Zi-peng1, LIU Xiao-wei1,2
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1.MEMS Centre,Harbin Institute of Technology,150001 Harbin,China;2.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing,Ministry of Education,150001 Harbin,China)
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| Abstract: |
| To bring the fabric of the micro-gyroscope into simulation of total closed-loop system,the equivalent electrical analogue of drive part of the micro-gyroscope is built.The new low noise closed-loop driving circuit is based on the phase-locked technology using the transimpedance amplifier to realize I-V transformation which effectively avoids phase error caused by the charge amplifier.By using the CCCII+technology to realize the floating resistor,the noise of the total closed-loop driving circuit is reduced.In simulation,the natural frequency of the micro-gyroscope is 2.7 kHz.The displacement in the drive direction of the micro-gyroscope has 90°phase leg comparing to the driving force in the drive direction.The value of floating resistor is 250 kΩ where the bias current is 50 μA.The active resistor is 0.037 fV2/Hz.The micro-gyroscope is vibrated at its natural frequency. |
| Key words: closed-loop micro-gyroscope CCCII+ |
