| 引用本文: | 武志鹏,陈兴林,李欣,姜晓明,刘川.双工件台光刻机换台过程的轨迹规划及控制[J].哈尔滨工业大学学报,2013,45(3):7.DOI:10.11918/j.issn.0367-6234.2013.03.002 |
| WU Zhipeng,CHEN Xinglin,LI Xin,JIANG Xiaoming,LIU Chuan
.Trajectory planning and control method for wafer stage exchange process of dual-stage lithography[J].Journal of Harbin Institute of Technology,2013,45(3):7.DOI:10.11918/j.issn.0367-6234.2013.03.002 |
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| 摘要: |
| 为减小双工件台光刻机的换台时间,提出了一种改进5阶S轨迹和时间-冲击最小控制算法．分析了双驱双桥换台策略,曝光位和预对准位的两个工件台依次执行5个点对点运动完成换台过程．在常规数值积分S轨迹设计方法中,增加了减小冲击的优化项,设计了改进5阶S轨迹使加速度曲线更加平滑．以换台过程的时间-冲击最小为优化指标,为工件台系统设计了最优控制算法从而大幅度减小换台时间,并且克服了单纯以时间最优Bang-Bang控制中加速度突变的缺点．仿真和实验结果表明,利用轨迹规划和最优控制方法可以实现快速换台运动,改进5阶S轨迹加速度曲线最平滑,时间-冲击最优控制比5阶S轨迹具有更短的换台时间． |
| 关键词: 双工件台 时间-冲击最小 S轨迹 双驱双桥 |
| DOI：10.11918/j.issn.0367-6234.2013.03.002 |
| 分类号: |
| 基金项目:国家科技重大专项资助项目(2009ZX02207). |
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| Trajectory planning and control method for wafer stage exchange process of dual-stage lithography |
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WU Zhipeng, CHEN Xinglin, LI Xin, JIANG Xiaoming, LIU Chuan
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(Dept. of Control Science and Engineering, Harbin Institute of Technology, 150001 Harbin, China)
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| Abstract: |
| To reduce the exchange time of dual-stage lithography, a modified fifth-order S-curve planning method and a minimum-time and minimum-jerk control method are proposed. The dual-driver and dual-bridge exchange method of the wafer stages is analyzed, and the wafer stages on the exposure position and pre-alignment position make five point-to-point movements to complete the exchange process. A minimum-jerk optimization index is added to fifth-order S-curve based on numerical integration method, and a modified fifth-order S-curve planning algorithm is proposed to ensure the acceleration curve is smooth. Aiming at a minimum-time and minimum-jerk criterion, an optimal control system is designed to reduce the exchange time and overcome the default of controlling the acceleration mutation only by the minimum-time Bang-Bang control. Simulation and experiment results show that the exchange process can be realized by trajectory planning and optimal control method. The acceleration curve of modified fifth-order S-curve is the most smooth, and minimum-time and minimum-jerk optimal control system can achieve a shorter exchange time. |
| Key words: dual-stage minimum-time and minimum-jerk S-curve dual-driver and dual-bridge
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