| 引用本文: | 陈兴林,姜晓明,王岩.扫描光刻系统的分段迭代学习控制策略[J].哈尔滨工业大学学报,2013,45(7):18.DOI:10.11918/j.issn.0367-6234.2013.07.004 |
| CHEN Xinglin,JIANG Xiaoming,WANG Yan
.Segmented iterative learning control strategy for wafer scanner systems[J].Journal of Harbin Institute of Technology,2013,45(7):18.DOI:10.11918/j.issn.0367-6234.2013.07.004 |
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| 摘要: |
| 结合扫描光刻系统的曝光特点,提出一种分段迭代学习控制方法．该方法继承了非因果迭代学习律充分学习的特点．为改善动态跟踪性能,在加速过程段对前一迭代周期的误差信息进行非因果学习,以保证其沿迭代轴的快速收敛性．为克服非因果迭代学习律盲目学习的缺点,在匀速曝光段不对误差信息进行非因果学习,以保证系统的曝光性能不发生恶化,并改善系统在时间轴的瞬态性能．此外,对该方法的收敛性进行了分析和证明,并结合实例,验证了方法的有效性． |
| 关键词: 迭代学习控制 扫描曝光 分段学习 非因果学习 |
| DOI：10.11918/j.issn.0367-6234.2013.07.004 |
| 分类号: |
| 基金项目:国家自然科学基金资助项目(61174037)； 国家科技重大专项资助项目(2009ZX02207). |
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| Segmented iterative learning control strategy for wafer scanner systems |
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CHEN Xinglin, JIANG Xiaoming, WANG Yan
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(School of Astronautics, Harbin Institute of Technology, 150001 Harbin, China)
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| Abstract: |
| Based on exposure characteristics of the wafer scanner, a segmented iterative learning control strategy is presented. The proposed method inherits the advantage of non-causal iterative learning control, which is full learning of errors. In order to improve the dynamic tracking performance, non-causal learning of errors in the last iteration is implemented during the acceleration phase, which guarantees the fast convergence of the system versus iteration domain. For the purpose of overcoming the weakness of blind learning for non-causal iterative learning control methods, errors are not learnt fully during the constant velocity so that exposure performance does not go bad. It improves the transient performance versus time. In addition, the convergence of the proposed method is analyzed and proved. Combining the numerical example, effectiveness of the method is testified. |
| Key words: iterative learning control scan and exposure segmented learning non-causal learning
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