| 引用本文: | 陈明君,王廷章,刘赫男,吴春亚,程健,苏定宁.高精度小型陀螺仪关键器件加工技术研究进展[J].哈尔滨工业大学学报,2020,52(6):218.DOI:10.11918/201910204 |
| CHEN Mingjun,WANG Tingzhang,LIU Henan,WU Chunya,CHENG Jian,SU Dingning.Research process on fabrication techniques for high precision micro gyroscope key component[J].Journal of Harbin Institute of Technology,2020,52(6):218.DOI:10.11918/201910204 |
|
| 摘要: |
| 主要介绍超流体陀螺仪、原子陀螺仪和微半球陀螺仪3种陀螺仪关键器件的结构特点、质量技术指标和制备技术要求,阐述高精度微小型陀螺仪核心器件的制备技术研究进展；详细综述普遍采用的MEMS加工技术及微纳加工技术等制造工艺；对比分析各关键器件的制备工艺,重点阐述各相关工艺存在的优势和局限性；分析微谐振器各制备工艺中模具加工技术的工艺特点及其对微谐振器制备质量的影响；探讨各关键器件的制备方法研究进展以及存在的问题与挑战,以期为后续微纳制造技术与陀螺仪技术的结合提供参考,并进一步推动相关制备技术的实际工程应用. |
| 关键词: 超流体陀螺仪 原子陀螺仪 微半球陀螺仪 关键器件 制备工艺 |
| DOI：10.11918/201910204 |
| 分类号:TH161 |
| 文献标识码:A |
| 基金项目:国家重点研发计划(2018YFB1107600) |
|
| Research process on fabrication techniques for high precision micro gyroscope key component |
|
CHEN Mingjun,WANG Tingzhang,LIU Henan,WU Chunya,CHENG Jian,SU Dingning
|
|
(Center for Precision Engineering,Harbin Institute of Technology, Harbin 150001, China)
|
| Abstract: |
| The superfluid gyroscope, atomic gyroscope and micro-hemispherical gyroscope have the possibility of high precision and miniaturization which make them the promising gyroscopes. The preparation quality of the key component of these three gyroscopes will directly affect their working performance, so it is necessary to perform in-depth research on the status of the key component preparation processes. Firstly, the structural characteristics, quality and technical indicators and their effect, and preparation technical requirements of these key components are briefly described. On this basis, the research progress on the fabrication technology of high-precision micro gyroscope key components is described, and the manufacturing processes such as the commonly used MEMS processing technology and micro-nano processing technology are reviewed in detail. By comparatively analyzing the preparation process of each key component, the advantages and limitations of each related process are emphasized. For micro-resonators, the process characteristics of mold processing technology in each preparation process and their influence on the quality of the micro-resonator are analyzed. Through analyzing the research progress of the preparation methods of each key component, the existing problems and challenges are discussed to provide a reference for the subsequent combination of micro-nano manufacturing technology and gyroscope technology, and further to promote the practical engineering application of related preparation technologies. |
| Key words: superfluid gyroscope atomic gyroscope micro-hemispherical gyroscope key component fabrication process |
