| 引用本文: | 郭占社,冯舟,庄海涵,宋春苗,樊尚春.考虑制作工艺和边缘效应的梳齿电容理论[J].哈尔滨工业大学学报,2010,42(12):2009.DOI:10.11918/j.issn.0367-6234.2010.12.034 |
| GUO Zhan-she,FENG Zhou,ZHUANG Hai-han,SONG Chun-miao,FAN Shang-chun.Theoretical study on the capacitance of comb actuator considering fabrication technology and edge effect[J].Journal of Harbin Institute of Technology,2010,42(12):2009.DOI:10.11918/j.issn.0367-6234.2010.12.034 |
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| 考虑制作工艺和边缘效应的梳齿电容理论 |
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郭占社1,2, 冯舟1,2, 庄海涵1,2, 宋春苗1,2, 樊尚春1,2
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1.北京航空航天大学仪器科学与光电工程学院;2.精密光机电一体化技术教育部重点实验室
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| 摘要: |
| 为解决梳齿驱动器中理想计算模型误差较大的问题,利用平板电容理论及微积分方法,对制作工艺及边缘效应的影响进行了分析,并建立相应的计算模型.在此基础上,以加工完毕的梳齿驱动器为研究目标,得到其电容在理想条件下、考虑制造工艺误差及边缘效应条件下的计算结果分别为1.267 3 pF和1.440 3 pF.两者与利用高精度LCR测试仪测量所得电容1.517 2 pF之间的相对误差分别为16.47%和5.07%.实验结果表明,考虑制造工艺误差及边缘效应时计算结果的精度远远高于理想条件下计算结果的精度,证明了该理论模型的正确性. |
| 关键词: MEMS 梳齿驱动器 平板电容理论 边缘效应 制作工艺 |
| DOI：10.11918/j.issn.0367-6234.2010.12.034 |
| 分类号:TH703 |
| 基金项目:航空基金项目(2008ZC51034);北京航空航天大学青年创新基金支持项目 |
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| Theoretical study on the capacitance of comb actuator considering fabrication technology and edge effect |
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GUO Zhan-she1,2, FENG Zhou1,2, ZHUANG Hai-han1,2, SONG Chun-miao1,2, FAN Shang-chun1,2
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1.School of Instrument Science & Opto-electronics Engineering,Beihang University,Beijing 100083,China;2.Key Laboratory of Precision Opto-mechatronics Techonology,Ministry of Education,Beijing 1000083,China
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| Abstract: |
| With plate capacitor theory and calculus method,the capacitance of micro electro-mechanical system(MEMS) electrostatic comb actuator is studied.Considering the affections of fabrication technology and edge effect,a calculating model is built,by which the calculations for the fabricated comb actuator are carried out under the ideal condition and the condition of considering border effect and fabricating technology.The calculated results are 1.267 3 pF and 1.440 3 pF respectively,of which the relative errors with the high precision LCR device measured value 1.517 2 pF are 16.47% and 5.07%.This indicates that the model can be used to get higher precision,if the border effect and fabrication process are taken into account. |
| Key words: MEMS comb actuator plate capacitor theory edge effect fabrication technology |
